| Superpure electronic hydrogen
peroxide
It is mainly used in etching of the metal surface of the integrated
circuit, and rinsing of silicon chip and integrated circuit, etc..It
has two types, which is super large-scale integrated circuit grade
(VLSI grade) and standard electronic grade (EL grade).
The product index is in conform with the standard requirement of
Q/JX001-1999
| Item |
Index |
| VLSI
Grade |
EL
Grade |
| 1. Content, % (W/W)
 |
30 |
30 |
| 2. Free acid( based
on H2SO4), PPM  |
30 |
30 |
| 3. involatile
substance,
PPM |
20 |
- |
| 4. Organic carbon
(TOC),
PPM |
- |
20 |
| 5. Chloride(Cl),
PPM |
0.5 |
0.5 |
| 6. Phosphate(PO4),
PPM |
1 |
2 |
| 7. sulfate(SO4),
PPM
|
1 |
5 |
| 8. Total nitrogen(N),
PPM
|
2 |
- |
| 9. Fe ,
PPM
|
0.03 |
0.05 |
| 10. Ni,
PPM |
0.01 |
0.05 |
| 11. Cu,
PPM |
0.01 |
0.05 |
| 12. Cd,
PPM |
0.01 |
0.05 |
| 13. Pb,
PPM |
0.01 |
0.3 |
| 14. As,
PPM |
0.01 |
0.01 |
| 15. Al,
PPM |
0.1 |
0.5 |
| 16. Cr,
PPM |
0.01 |
0.05 |
| 17.
Zn,
PPM |
0.05 |
0.1 |
| 18. Ca,
PPM |
0.05 |
0.2 |
| 19. Mg,
PPM |
0.05 |
0.1 |
| 20. Na,
PPM |
0.05 |
0.5 |
| 21. K,
PPM |
0.05 |
0.5 |
| 22. Mn,
PPM |
0.01 |
0.05 |
| 23. Mo,
PPM |
0.01 |
- |
| 24. Ti,
PPM |
0.01 |
0.3 |
| 25. B,
PPM |
0.02 |
0.1 |
| 26. Sn,
PPM |
0.02 |
1 |
| 27. Au,
PPM |
0.02 |
0.3 |
| 28. Ag,
PPM |
0.02 |
- |
| 29. NH4,
PPM |
2 |
- |
| 30. Ba,
PPM |
0.05 |
- |
| 31. Co,
PPM |
0.01 |
- |
| 32. Pt,
PPM |
0.02 |
- |
| 33. Bi,
PPM |
0.02 |
- |
| 34. In,
PPM |
0.02 |
- |
| 35. Li,
PPM |
0.01 |
- |
| 36. Sr,
PPM |
0.01 |
- |
| 37. Tl,
PPM |
0.02 |
- |
| 38. Be,
PPM |
0.01 |
- |
| 39. Ga,
PPM |
0.02 |
- |
| 40. Ge,
PPM |
0.02 |
- |
| 41. V,
PPM |
0.01 |
- |
| 42. Zr,
PPM |
0.01 |
- |
|
