Professional production supplier of
ultra-high purity hydrogen peroxide

Service Hotline:

+86-571-63963488

Products

Ultra pure electron grade hydrogen peroxide

Product standard: Chemical industry standard "High purity Industrial Product Hydrogen peroxide" HG/T 5736-2020

No. Item Specification
HP UP
HP-1 HP-2 UP-1 UP-2 UP-3 UP-4
1

Content(H2O2%),W/%

30-35

30-35

30-32

30-32 30-32

30-32

2

Chrominance(Hazen),≤

-

-

10

10 10

10

3

Free acid(H2SO4),ppm ≤

30

30

30

30 10

10

4

Total organic carbon(TOC),ppm,≤

40

40

20

20 10

10

5

Chloride(Cl),ppm,≤

0.5

0.5

0.2

0.2 0.03

0.03

6

Nitrate(SO3),ppm,≤

4

2

0.4

0.4 0.03

0.03

7

Phosphate(PO4),ppm,≤

2

1

0.2

0.2 0.03

0.03

8

Sulfate(SO4),ppm,≤

2

2

0.2

0.2 0.03

0.03

9

(Al,ppb,≤

500

100

10

1 0.1

0.01

10 (As),ppb,≤

50

20

5

1 0.1

0.01

11 (B),ppb,≤ 20 20 10 1 0.1

0.01

12 (Ba),ppb,≤ 100 50 10 - - 0.01
13 (Ca),ppb,≤

200

100

10

1 0.1

0.01

14 (Cd),ppb,≤

50

50

10

1 -

-

15 (Cr),ppb,≤

20

20

10

1 0.1

0.01

16 (Cu),ppb,≤

20

20

10

1 0.1

0.01

17 (Fe),ppb,≤

100

100

10

1 0.1

0.01

18 (K),ppb,≤

200

100

10

1 0.1

0.01

19 (Mg),ppb,≤

100

50

10

1 -

0.01

20 (Mn),ppb,≤

50

20

10

1 0.1

0.01

21 (Na),ppb,≤

500

100

10

1 0.1

0.01

22 (Ni),ppb,≤

50

10

10

1 0.1

0.01

23 (Pb),ppb,≤

50

50

10

1 0.1

0.01

24 (Sb),ppb,≤

20

20

5

1 0.1

0.01

25 (Sn),ppb,≤

50

50

10

1 0.1

0.01

26 (Ti),ppb,≤

100

50

10

  0.1

0.01

27 (V),ppb,≤

-

-

10

1 -

0.01

28 (Zn),ppb,≤

100

50

10

1 0.1

0.01

29

The number of particles,(μm,pcs/mL) ≤

-

-

-

To use

Ultra-high purity electron grade hydrogen peroxide is a very important wet electronic chemical. It is mainly used as cleaning agent, etching agent and photoresist remover for integrated circuit semiconductor and silicon wafer. Impurities in products will have a fatal impact on the performance of components, and have a very important impact on the yield, electrical performance and reliability of integrated circuits. Therefore, the semiconductor industry is very strict on the purity of ultra-high purity hydrogen peroxide products. In the field of semiconductor materials, the current process of 7 nanometers of wire width and 12 inches of wafers requires hydrogen peroxide to reach a level of less than 10ppt.

Product packaging
Ultra pure electron grade hydrogen peroxide Ultra pure electron grade hydrogen peroxide Ultra pure electron grade hydrogen peroxide

200 litre Interg drum

IBC drum

20-30t tank truck (lined with PFA/n-PDFE)

Product transportation

This product is transported according to oxidant transport rules to prevent violent shaking;
Do not touch with hands directly. Wear plastic gloves during operation;
In case of accidental contact or package leakage, rinse with plenty of water.

Add: No. 858, Longdu Street, Longgang Industrial Park, Lin’An District, Hangzhou, Zhejiang
Tel: +86-571-6396 3488,6373 5088

Add: No. 858, Longdu Street, Longgang Industrial Park, Lin’An District, Hangzhou, Zhejiang
Tel: +86-571-6396 3488,6373 5088

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